Drive system for a carrier head support structure

专利名称：Drive system for a carrier head support

structure

发明人：William Bartlett,Arulkumar

Shanmugasundram,Jim Tobin

申请号：US09523402申请日：20000310公开号：US06350188B1公开日：20020226

专利附图：

摘要：A chemical mechanical polishing apparatus has a polishing station, a transferstation, a carrier head to support a substrate, a rotatable carousel supporting the carrier

head, a carousel drive shaft coupled to the carousel to rotate the carousel, and acarousel drive system. The carousel is rotatable between a first position in which thecarrier head is in the polishing station and a second position in which the carrier head is inthe transfer station. The carousel drive system includes a drive motor, a gear reductionbox coupled to an output of the drive motor, and a brake system coupling the gearreduction box to the drive shaft.

申请人：APPLIED MATERIALS, INC.

代理机构：Fish & Richardson

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